Work

Modeling and Optimization of Wet ALE Process

Year: 2024

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/11401.0101ecst

Authors: Derek Bassett, Kate Abel

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402931461

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