Work

(Invited) Advancing Si Spin Qubit Research: Process Integration of Hall Bar FETs on Si/SiGe in a 200mm BiCMOS Pilot Line

Year: 2024

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/11402.0109ecst

Authors: Felix Reichmann, Alberto Mistroni, Yuji Yamamoto, Philipp Kulse, Steffen Marschmeyer, Dirk Wolansky, Oksana Fursenko, Marvin Hartwig Zöllner, Giovanni Capellini, Laura Diebel, Dominique Bougeard, Marco Lisker

Language: English

Topic: Quantum and electron transport phenomena

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402931713

FWCI: 2.5

Cites:

Cited by: 1

Related to: 10