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(Digital Presentation) Investigation of Nanoconfined Wet Etching Mechanism Using MD Simulation

Year: 2024

Type: conference-paper

Source: ECS Transactions

DOI: 10.1149/11401.0133ecst

Authors: Yuki Yoshida, Takeo Nakano, Sangita Kumari, Shan Hu, Peter D’elia

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4402932016

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