Improved Subthreshold Characteristics of Epi-Silicon FinFET via Fin Surface Passivation Technologies
Year: 2024
Type: article
Authors: Wang Peng, Guanqiao Sang, Kun Yang, Jiaxin Yao, Lianlian Li, Lei Cao, Renjie Jiang, YuPeng Lu, QingKun Li, Qingzhu Zhang, Junfeng Li, Huaxiang Yin
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403013795
