Static and dynamic characteristics of electrostatically coupled MEMS beams under asymmetric actuation conditions
Year: 2024
Type: article
Source: Engineering Research Express
Authors: Uma Shankar, Anand Bhushan
Institution: National Institute of Technology Patna
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403054841