Measurement of Electromagnetic Parameters of Inductively Coupled Plasma Based on Langmuir Probe
Year: 2024
Type: conference-paper
Authors: Yan Zheng, Jiangting Li, Yi Yan, Baili Duan
Institution: Xidian University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403123534