Fed-SEMI: A Federated Machine Learning Framework for Nano-Scale Defect Classification and Detection in Semiconductor Manufacturing with Decentralized and Private Data
Year: 2024
Type: conference-paper
Source: International Symposium ELMAR
Authors: Bappaditya Dey, Jacob Deforce, Victor Blanco, Sandip Halder, Philippe Leray
Institutions: IMEC, Ghent University
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403125838