Structure and electrical properties of polysilicon films doped with ammonium tetraborate tetrahydrate
Year: 2024
Type: article
Source: Journal of Semiconductors
Authors: Yehua Tang, Yuchao Wang, Chunlan Zhou, Ke-Fan Wang
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403135993
