Work

Analysis of Gas Detection Sensitivity of a Self Plasma-Optical Emission Spectrometer Using an N2 and Ar Gas-Mixing Evaluation System

Year: 2024

Type: article

Abstract: A self plasma-optical emission spectrometer (SP-OES) is a sensor that analyzes the residual gases in an exhaust line by detecting the intrinsic wavelength of the species excited by the self-plasma module.SP-OESs are used in semiconductor processes, such as cleaning, etching, and deposition, for leak detection and process monitoring.In recent years, with the shrinking scale of semiconductor processes, detection of small variations in gas compositions has become crucial.Therefore, the sensitivity of SP-OESs must be analyzed and optimized for advanced process monitoring in the future.However, the SP-OES detection sensitivity has been rarely quantitatively evaluated and optimized.In this study, various parameters that affect the detection sensitivity of SP-OESs were analyzed and optimized using a gas-mixing system to determine the dependence of the sensitivity on a predetermined gas-mixing ratio.The limit of detection was obtained to evaluate the sensitivity of SP-OESs.Parameters such as the integration time for photon collection, pressure under the self-plasma module, and selected wavelength were analyzed to improve the sensitivity of SP-OESs.

Source: Applied Science and Convergence Technology

DOI: 10.5757/asct.2024.33.5.130

Authors: Geon Woong Eom, Sang Ho Lee, In Yong Park, Woo Seok Kang, Min Hur, Dae-Woong Kim

Institutions: Chungnam National University, Korea Institute of Machinery & Materials

Language: English

Topic: Laser-induced spectroscopy and plasma

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

Funders: Ministry of Trade, Industry and Energy, Korea Institute of Machinery and Materials, Ministry of SMEs and Startups

Awards: G4032568992, G4742326496, G8854896503