Work

X-Band Bulk Acoustic Wave Resonators With High Figure of Merit Based on Al₀.₈Sc₀.₂N

Year: 2024

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/led.2024.3474733

Authors: Yuhan Zhu, Yinuo Zhang, Tianyou Luo, Xinyan Yi, Guoqiang Li

Institutions: State Key Laboratory of Luminescent Materials and Devices, South China University of Technology

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Key Research and Development Program of China, China Aerospace Science and Technology Innovation Fund

Awards: G4934913847, G6091591738

OpenAlex ID: W4403182931

FWCI: 0.533

Cites: 31

Cited by: 5

Related to: 10