Work

Nanochannels in Fused Silica through NaOH Etching Assisted by Femtosecond Laser Irradiation

Year: 2024

Type: article

Abstract: Sodium hydroxide (NaOH) is increasingly drawing attention as a highly selective etchant for femtosecond laser-modified fused silica. Unprecedented etching contrasts between the irradiated and pristine areas have enabled the fabrication of hollow, high-aspect-ratio structures in the bulk of the material, overcoming the micrometer threshold as the minimum feature size. In this work, we systematically study the effect of NaOH solutions under different etching conditions (etchant concentration, temperature, and etching time) on the tracks created by tightly focused femtosecond laser pulses to assess the best practices for the fabrication of hollow nanostructures in bulk fused silica.

Source: Materials

DOI: 10.3390/ma17194906

Authors: Pasquale Barbato, Roberto Osellame, Rebeca Martínez Vázquez

Institutions: Istituto di Fotonica e Nanotecnologie, National Research Council, Politecnico di Milano

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,955

Funder: European Commission