Work

ITO-Based Electrically Tunable Metasurface for Active Control of Light Transmission

Year: 2024

Type: article

Abstract: In recent years, the rapid development of dynamically tunable metasurfaces has provided a new avenue for flexible control of optical properties. This paper introduces a transmission-type electrically tunable metasurface, employing a series of subwavelength-scale silicon (Si) nanoring structures with an intermediate layer of Al2O3-ITO-Al2O3. This design allows the metasurface to induce strong Mie resonance when transverse electric (TE) waves are normally incident. When a bias voltage is applied, the interaction between light and matter is enhanced due to the formation of an electron accumulation layer at the ITO-Al2O3 interface, thereby altering the resonance characteristics of the metasurface. This design not only avoids the absorption loss of metal nanostructures and has a large modulation depth, but also shows compatibility with complementary metal oxide semiconductor (CMOS) technology.

Source: Nanomaterials

DOI: 10.3390/nano14191606

Authors: Ruize Ma, Yu Mao, Peiyang Li, Dong Li, Dandan Wen

Institutions: Northwestern Polytechnical University, Ministry of Industry and Information Technology

Language: English

Topic: Metamaterials and Metasurfaces Applications

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $3,296

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China