Analysis of the impact of post-process modifications on the properties of TiO2 thin films with high-temperature stable anatase phase deposited by the electron beam evaporation method
Year: 2024
Type: article
Abstract: In this study, the structural, optical, tribological, and mechanical properties of TiO2 coatings were described. Titanium dioxide thin films were prepared by the electron beam evaporation method and additionally annealed at temperature up to 800°C. X-ray diffraction analysis revealed the amorphous phase of as-deposited and annealed at 200°C coatings. The phase transition to anatase phase occurred at 400°C. SEM images revealed changes in the surface morphology and grain structure of thin films after post-process annealing. The optical transmission measurements showed a redshift in the fundamental absorption edge with increasing annealing temperature, accompanied by a decreasing transparency level. Tribological tests revealed reduced scratch resistance with higher annealing temperatures, attributed to increased surface roughness and coating removal. Nanoindentation measurements showed a decrease in hardness with annealing temperature. This comprehensive analysis of TiO2 thin film coatings showed that the post-process annealing should be carefully controlled for films used in optoelectronic applications.
Source: Opto-Electronics Review
Authors: Agata Obstarczyk, Ewa Mańkowska, Wiktoria Weichbrodt, Paulina Kapuścik, Wojciech Kijaszek, Michał Mazur
Institution: Wrocław University of Science and Technology
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4403195988