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Automated System for Cleaning Semiconductor Wafer

Year: 2024

Type: article

Source: The Journal of Korean Institute of Information Technology

DOI: 10.14801/jkiit.2024.22.9.61

Authors: So-Young Kwon, Young-Hyung Kim, Jong-Ik Park, Young-Kwang Hwang, Jong-seok Lee

Language: English

Topic: Industrial Automation and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Kumoh National Institute of Technology

OpenAlex ID: W4403201389

FWCI:

Cites: 7

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Related to: 10