Pulse Duration Dependent Formation of Laser‐Induced Periodic Surface Structures in Atomic Layer Deposited MoS2
Year: 2024
Type: article
Abstract: In this paper, the formation of laser‐induced periodic surface structures (LIPSS) on atomic‐layer deposited MoS2 layers are studied experimentally. The process parameters (laser fluence and the pulse overlap) corresponding to formation of low‐ and high‐spatial frequency LIPSS as well as ablation and modification of the layers are identified for different pulse durations in the range from 0.2 to 10 ps. The role of the temperature accumulation is evaluated by changing the repetition rate from 0.2 to 2 MHz. The negative accumulation effect, i.e., the ablation of the layers becomes more difficult at higher laser pulse overlaps, is also observed. A simple model explaining the transition between different types of the LIPSS and the decrease of the ablation efficiency with the pulse overlap is suggested.
Source: Advanced Materials Interfaces
Authors: Malte J. M. J. Becher, Jonas B. Ullrich, Julia Jagosz, Aleksander Kostka, Claudia Bock, Andreas Ostendorf, Evgeny L. Gurevich
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $3,100
Awards: G136839356, G1392483079, Forschungslabor Mikroelektronik Bochum für 2D-Elektronik - ForLab PICT2DES, G663678559, Verbundprojekt: Erforschung neuartiger, flexibler Sensorsysteme auf Basis zweidimensionaler Materialsysteme - ForMikro-FlexTMDSense -, Teilvorhaben: Erforschung neuartiger Prozesstechnologien für flexible pH-Sensorsysteme auf Basis von zweidimensionalen Materialien
OpenAlex ID: W4403202380