Lithography Process Verification on Porous PET Membranes for Cell Measurements Using THz-TDS Imaging
Year: 2024
Type: conference-paper
Institution: Universität Ulm
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W4403210774
