A fast multiplication algorithm for Gabor coefficients
Year: 2024
Type: conference-paper
Abstract: Optical scatterometry is a fast, non-destructive, and accurate technique for monitoring integrated circuits (ICs) for defects during their lithographic production process. The detection of these defects with potentially sub-wavelength size hinges on the accurate scattered electromagnetic fields as provided by a Maxwell solver. Generating this information typically induces a heavy computational workload. To this end, it is key to develop computationally efficient Maxwell solvers, to provide this information in a fast and accurate manner as a means to safeguard the production quality of ICs.
Authors: S. Eijsvogel, R.J. Dilz, M.C. Van Beurden
Institution: Eindhoven University of Technology
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4403211727