Work

Fast simulation of the aerial image of 1D rotated features in an anamorphic system

Year: 2024

Type: article

Source: Journal of Micro/Nanopatterning Materials and Metrology

DOI: 10.1117/1.jmm.24.1.011003

Authors: Bas van Meerten, Thomas V. Pistor, Laurens de Winter

Institution: ASML (Netherlands)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403214128

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