Unconventional coil shape design of eddy current sensors and the effect of shape parameters on the micro/nano-scale metal film thickness measurement performance
Year: 2024
Type: article
Authors: Hongkai Li, Xinghao Lu, Jinlong Wang, Tong Zhang
Institution: Beijing Institute of Technology
Language: English
Subfield: Mechanical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3295298782, G5634337944
OpenAlex ID: W4403222712