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Optomechanical Infrared Detector Monolithically Integrated with Micro-Metalens Array

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Year: 2024
Type: article
Source: ACS Photonics
DOI: 10.1021/acsphotonics.4c00904
Authors: Zhendong Luo, Huwang Hou, Ting Meng, Yiming Li, Tao Wang, Yanji Yi, Lianjie Xu, Zhiyu Chen, Hongmei Zhong, Ye Feng, Peng Zhang, Yang Zhao
Institutions: University of Science and Technology of China, City University of Hong Kong, Shenzhen Polytechnic University
Language: English

Topic: Advanced MEMS and NEMS Technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Department of Education of Guangdong Province, Science, Technology and Innovation Commission of Shenzhen Municipality, National Key Research and Development Program of China
Awards: G1361852101, G2470925622, G2677550469, G4738467357, G8233079463
OpenAlex ID: W4403285752
FWCI: 0.822
Cites: 43
Cited by: 8
Related to: 10
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