Work

Algorithm for monitoring long-term instability of laser writing systems DOE by analyzing the diffraction efficiency of 2D diffractive sensor elements

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3036016

Authors: Dmitrij A. Belousov, Victor P. Korolkov, Roman I. Kuts, Ruslan V. Shimansky

Institution: Institute of Automation and Electrometry

Language: English

Topic: Optical Systems and Laser Technology

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403288521

FWCI:

Cites: 10

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Related to: 10