Fabricating 3D Si nanostructure via a novel Ga+ implantation enabled maskless dry etching process
Year: 2024
Type: article
Source: Physica Scripta
Authors: Huimin Shi, Zilong Wang, Haicheng Chen, Yuhao Hong, Gaowa Liu, Xupeng Zhu, Tao Wang, Yasi Wang
Institutions: Northwest Normal University, Lingnan Normal University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403288774