Tunable phase and electrical characteristics induced by Al content in Zr1− xAlxN films for temperature sensors with wide temperature range
Year: 2024
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0226397
Authors: Yanjie Li, Minmin You, Yongpeng Ran, Xiantao Zhu, Zude Lin, Jingquan Liu
Institution: Shanghai Jiao Tong University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1231589958, G5672258570, G6206489487
OpenAlex ID: W4403305157