Work

Study on the intelligent valuation technique of step height standards based on atomic force microscopy

Year: 2024

Type: conference-paper

Source: Global Intelligent Industry Conference (GIIC)

DOI: 10.1117/12.3032361

Authors: Chong Yue, Weifen He, Jun Xiong, Xin Chen, Kun Jiang

Institution: Chongqing Metrology Quality Inspection and Research Institute

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403316249

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Cites: 10

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Related to: 10