Theory and method of pulsed ion beam single crystal silicon reshaping based on controllable time-varying removal function
Year: 2024
Type: conference-paper
DOI: 10.1117/12.3032022
Authors: rongjie Liao, tengduo Qiao, ziyao Tian, yuyang Wang, guanlin Li, dongyang Qiao, ci Song, Xing Peng
Institution: National University of Defense Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403316300