Work

Optimization method of scanning strategy for reactive ion beam etching of large aperture grating elements

Year: 2024

Type: conference-paper

Source: Global Intelligent Industry Conference (GIIC)

DOI: 10.1117/12.3032015

Authors: Bo Zhang, Longxiang Zhang, Xuran Chang, Xunchang Ma, Cheng Zhang, Wentong Xiao, Feng Shi, gang zhou, Xing Peng

Institution: National University of Defense Technology

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403316345

FWCI:

Cites: 2

Cited by:

Related to: 10