Work

Rapid and precise focusing method for image-based overlay metrology

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3035862

Authors: Wuhao Liu, Mingchun Ling, Maoxin Song, Hengrui Guan, Hengwei Qin, Jun Wang, Jin Hong

Institutions: University of Science and Technology of China, Hefei Institutes of Physical Science

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403326584

FWCI: 0.458

Cites: 11

Cited by: 2

Related to: 10