Analytical Solution of Nonlinear Dynamics in Electrostatically Driven MEMS Scanning Mirrors
Year: 2024
Type: article
Authors: Changfeng Xia, Dayong Qiao, Anjie Peng, Zhen Chen, Xudong Song, Xiumin Song, Pengwen Xiong
Institutions: Nanchang University, Northwestern Polytechnical University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G3830354624
OpenAlex ID: W4403331195