Catalytic disproportionation of trimethoxysilane to monosilane: Studies on catalyst, kinetics and reactor modeling
Year: 2024
Type: article
Abstract: Monosilane is an indispensable special gas used in semiconductor, photovoltaic, LED, TFT, and lithium-ion battery industries. In this work, a chlorine-free route for monosilane by the disproportionation of trimethoxysilane (TMS) was investigated with a novel efficient and stable solid alkaline catalytic system composed of γ-Al 2 O 3 supported K 2 CO 3 . TMS conversion of 71.6 % and silane selectivity of 97.6 % were obtained on the 15K 2 CO 3 /γ-Al 2 O 3 catalyst with a high WHSV of 8 h −1 , which could be operated stably over 300 h. Furthermore, the reaction kinetic model was established based on the E-R mechanism and a catalytic pathway was proposed according to kinetic results and DFT calculation. A novel reactive distillation reactor with cascaded condensers for silane production was simulated by using Aspen Plus. The results showed that the energy consumption of TMS disproportionation is much lower than that in TCS disproportionation.
Source: Chemical Engineering Science
Institution: Shanghai Jiao Tong University
Language: English
Subfield: Catalysis
Field: Chemical Engineering
Domain: Physical Sciences
Open Access status: hybrid
Estimated APC paid: $3,930
OpenAlex ID: W4403347998