Nitrogen‐Induced Microcrystalline‐to‐Nanocrystalline Structure Transition in Diamond Films Grown by Microwave Plasma Chemical Vapor Deposition: Comparison of N2 and NH3 Precursors
Year: 2024
Type: article
Source: physica status solidi (a)
Institutions: Russian Academy of Sciences, Prokhorov General Physics Institute, National Research University Higher School of Economics, MIREA - Russian Technological University, Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, Harbin Institute of Technology
Language: English
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
Funder: Russian Science Foundation
Award: G3544048668
OpenAlex ID: W4403371746