Work

A novel wafer defocus measurement method for spot-scanning imaging system using laser triangulation

Year: 2024

Type: article

Source: Measurement Science and Technology

DOI: 10.1088/1361-6501/ad866d

Authors: Zuoda Zhou, Dingjun Qu, Ruizhe Ding, Haiyan Luo, Wei Xiong, Zhiwei Li, Wei Jin, Yu Ru, Shihao Jia, Jin Hong

Institutions: University of Science and Technology of China, Chinese Academy of Sciences, Hefei Institutes of Physical Science

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: 用于大气二氧化碳探测的空间静态偏振调制干涉光谱技术研究, G7980495295

OpenAlex ID: W4403387680

FWCI: 0.144

Cites: 20

Cited by: 1

Related to: 10