Work

Optimizing Sensitivity and Bandwidth in Ciliary MEMS Vector Hydrophones Using a Dandelion-Like Composite Ciliary Structure

Year: 2024

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2024.3475749

Authors: Zimeng Guo, Guojun Zhang, Ruimin Zhang, Yuhao Huang, Yan Liu, Hang Zhao, Fuzhe Zhang, Wendong Zhang

Institution: North University of China

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G3598529726

OpenAlex ID: W4403390294

FWCI: 0.516

Cites: 16

Cited by: 5

Related to: 10