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Investigating the Tapered Profiles on the Parasitic Inductance of Through-Silicon Vias

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Year: 2024
Type: article
Source: IEEE Transactions on Components Packaging and Manufacturing Technology
DOI: 10.1109/tcpmt.2024.3480697
Authors: Jinxu Liu, Jihua Zhang, Zhen Fang, Hongwei Chen, Libin Gao, Wenlei Li, Tianpeng Liang, Wanli Zhang
Institutions: University of Electronic Science and Technology of China, State Key Laboratory of Electronic Thin Films and Integrated Devices, Chengdu University of Technology
Language: English

Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences

Open Access status: closed

Funder: Fundamental Research Funds for the Central Universities
Award: G3553091275
OpenAlex ID: W4403390496
FWCI: 0.206
Cites: 14
Cited by: 2
Related to: 10
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