Year: 2024
Type: article
Abstract: Theoretical models are presented for quasi-optical four-port acoustic devices based on NEMS-coupled beam arrays. Analogies with coupled mode devices in microwaves, ultrasonics, optics, and electron wave optics are first reviewed, together with coupled beam filters. Power transfer between two mechanically coupled, electrostatically driven, coupled beam arrays is then demonstrated using a lumped element model, and the conditions for full power transfer are established. Four-port devices, including directional couplers and coupler filters with complementary transmission ports, are then demonstrated. Predictions are verified for realistic device layouts using the stiffness matrix method.
Source: Micromachines
DOI: 10.3390/mi15101257
Author: Richard Syms
Institution: Imperial College London
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,955
OpenAlex ID: W4403391909