Honeycomb-Shaped Phononic Crystals on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Miniaturization
Year: 2024
Type: article
Abstract: A SAW device with a multi-layered piezoelectric substrate has excellent performance due to its high Q value. A multi-layer piezoelectric substrate combined with phononic crystal structures capable of acoustic wave reflection with a very small array can achieve miniaturization and high performance. In this paper, a honeycomb-shaped phononic crystal structure based on 42°Y-X LT/SiO2/poly-Si/Si-layered substrate is proposed. The analysis of the bandgap distribution under various filling fractions was carried out using dispersion and transmission characteristics. In order to study the application of PnCs in SAW devices, one-port resonators with different reflectors were compared and analyzed. Based on the frequency response curves and Bode-Q value curves, it was found that when the HC-PnC structure is used as a reflector, it can not only improve the transmission loss of the resonator but also reduce the size of the device.
Source: Micromachines
DOI: 10.3390/mi15101256
Authors: Panliang Tang, Hongzhi Pan, Temesgen Bailie Workie, Jia Mi, Jingfu Bao, Ken-ya Hashimoto
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $2,955
OpenAlex ID: W4403402435