In Situ Release Technology for MEMS Sensor Using Carbonate Thermal Decomposition Materials
Year: 2024
Type: article
Source: IEEE Sensors Journal
Authors: Cheng Xie, Kaiyue Zhou, Jia Li, Weibing Wang
Institutions: Chinese Academy of Sciences, Institute of Microelectronics
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Chinese Academy of Sciences
Award: G5374180688
OpenAlex ID: W4403446590