Work

Development of a Spatial Resolution-Enhanced Digital-Hologram Microscope With a Liquid Crystal Phase Modulator

Year: 2024

Type: article

Abstract: We proposed a DHM system with improved spatial resolution compared with that of the polarized camera-based DHM system by employing a liquid crystal phase modulator (LCPM). The LCPM-based holographic interferometry optical system can reliably construct a four-step phase shifting scheme by changing the applied voltage, thus eliminating the need for mechanical moving parts. The spatial resolution characteristics of the proposed DHM system were analyzed using the 1951 USAF resolution target. These characteristics showed a fourfold improvement over the polarized camera-based DHM system. Additionally, the 3D information capturing capability of the proposed DHM system was experimentally confirmed using a via-hole array sample produced through the semiconductor fabrication process.

Source: IEEE photonics journal

DOI: 10.1109/jphot.2024.3481418

Authors: Ha-Mong Shim, Ki-Dong Lim, Min-Kyu Park, Kwang-Hoon Lee, Jin Hyeok Kim, Sungjin Lim, Kyung-Il Joo

Institutions: Korea Photonics Technology Institute, Chonnam National University

Language: English

Topic: Digital Holography and Microscopy

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $1,995

OpenAlex ID: W4403447719

FWCI:

Cites: 31

Cited by:

Related to: 10