Work

Tatian polynomial-based annular pupil wavefront optimization method for high-NA extreme ultraviolet lithography

Year: 2024

Type: article

Source: Applied Optics

DOI: 10.1364/ao.539416

Authors: Miao Yuan, Zhaoxuan Li, Zhen Li, He Yang, Weichen Huang, Yanqiu Li

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G2214122415

OpenAlex ID: W4403452601

FWCI:

Cites: 31

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Related to: 10