Lithium niobate electro-optical modulator based on ion-cut wafer scale heterogeneous bonding on patterned SOI wafers
Year: 2024
Type: article
Source: Photonics Research
DOI: 10.1364/prj.534954
Institutions: Shanghai University, Shanghai Industrial Technology Institute
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Awards: G2096954365, 微纳集成光子器件智能设计基础研究, G541347858
OpenAlex ID: W4403467399
