Work

Innovative Designs For Enhancing the Functionality of MEMS-Based Phase Plates through Numerical Simulation and Optimisation

Year: 2024

Type: conference-paper

Source: BIO Web of Conferences

DOI: 10.1051/bioconf/202412904039

Authors: Payam Habibzadeh Kavkani, Vincenzo Grillo, Marco Beleggia

Institution: University of Modena and Reggio Emilia

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W4403496611

FWCI:

Cites: 3

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Related to: 10