Work

Manipulating tin ablation for EUV production

Year: 2024

Type: conference-paper

Source: International Conference on Extreme Ultraviolet Lithography

DOI: 10.1117/12.3037004

Authors: Alec Griffith, Anatoli Morozov, Kirill V. Lezhnin, Samuel R. Totorica, Will Fox, Ahmed Diallo

Institutions: Princeton Plasma Physics Laboratory, Princeton University

Language: English

Topic: Laser-Plasma Interactions and Diagnostics

Subfield: Nuclear and High Energy Physics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403508070

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