Work

Fast Demodulated White-Light Interferometry-Based Measurement and Theoretical Verification of Mechanical Sensitivity of MEMS Biomimetic Microphone With Fiber-Optic Fabry-Pérot Interferometer

Year: 2024

Type: article

Source: IEEE Sensors Journal

DOI: 10.1109/jsen.2024.3479197

Authors: Dipeng Ren, Xiaonan Yang, Zhi-Mei Qi

Institutions: Zhengzhou University, Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Aerospace Information Research Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G1193729422, G4133108643, G6021943918

OpenAlex ID: W4403510639

FWCI: 0.208

Cites: 33

Cited by: 2

Related to: 10