Work

Overcoming Local Distribution Limits in the SNC Process in a 10-nm Node DRAM by Applying a Multilayer Contact

Year: 2024

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2024.3474609

Authors: SeKyoung Jang, SoYoung Kim

Institution: Sungkyunkwan University

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Research Foundation of Korea

OpenAlex ID: W4403511641

FWCI: 0.312

Cites: 27

Cited by: 3

Related to: 10