Work

Obtaining Nano-Structural Thin Compounds Formed by Microwave Plasma

Year: 2024

Type: conference-paper

Source: International Conference on Actual Problems of Electron Devices Engineering

DOI: 10.1109/apede59883.2024.10715908

Authors: Vyacheslav V. Komarov, Andrey V. Durakov

Institution: Yuri Gagarin State Technical University of Saratov

Language: English

Topic: Advanced Materials and Semiconductor Technologies

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403535285

FWCI:

Cites: 6

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Related to: 10