Work

Terahertz Plasma Annealing of Gallium Arsenide in a Microcavity Resonator Powered by a Gyrotron

Year: 2024

Type: conference-paper

Source: International Conference on Actual Problems of Electron Devices Engineering

DOI: 10.1109/apede59883.2024.10715907

Authors: M. L. Kulygin, E. A. Novikov, I. A. Litovsky, M. V. Kamensky, O. A. Malshakova, A. A. Sorokin

Institution: Institute of Applied Physics

Language: English

Topic: Terahertz technology and applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Russian Science Foundation

OpenAlex ID: W4403535365

FWCI:

Cites: 17

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Related to: 10