Work

Effect of Reactive Magnetron Sputtering Modes (DCMS, HIPIMS, and DC + HIPIMS) on the Properties of Copper Oxide Films

Year: 2024

Type: article

Source: The Physics of Metals and Metallography

DOI: 10.1134/s0031918x24600180

Authors: V. A. Semenov, S. V. Rabotkin, A. S. Grenadyorov, A. A. Solovyev, V. O. Oskirko, A. N. Zakharov, A. V. Shipilova

Institutions: Russian Academy of Sciences, Institute of High Current Electronics

Language: English

Topic: Copper-based nanomaterials and applications

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403574691

FWCI: 0.19

Cites: 28

Cited by: 2

Related to: 10