Work

Fused Silica Micro Shell Resonators by a Wafer-Level Thermal Reflow Process

Year: 2024

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2024.3478842

Authors: Zhaoxi Su, Bin Luo, Linqian Zhu, Zelin Xu, Haoyang Li, Jintang Shang

Institution: Southeast University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403635750

FWCI: 0.205

Cites: 24

Cited by: 2

Related to: 10