Temperature-Stable AlScN-on-Si Shear-BAW Resonator with > 1.8M Quality Factor and < 1 ppb Frequency Drift enabled by Closed-loop Instinctual Self-Ovenization
Year: 2024
Type: conference-paper
Authors: Baibhab Chatterjee, Dicheng Mo, Shaurya Singh Dabas, Ratul Kundu, Everestus Ezike, Anyu Jiang, Asif Iftekhar Omi, Roozbeh Tabrizian
Institution: University of Florida
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403675672