Device Modeling and Optimization of MEMS Based Capacitive Pressure Sensor
Year: 2024
Type: conference-paper
Authors: Praveen Yadav, Rubina Siddique, Saurabh Kumar Pandey
Institution: Indian Institute of Technology Patna
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4403675836