Work

Atom Probe Tomography: Introduction and Applications to SEMI

Year: 2024

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2024tpy1

Author: Katherine P Rice

Institution: Cameca (United States)

Language: English

Topic: Advanced Materials Characterization Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4403684749

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